China's self-developed DUV lithography machine enters mass production, with Yangtze Memory Technologies potentially being one of the first adopters

July 27th, according to sources familiar with the matter cited by The Information, a Chinese state-backed enterprise has begun mass production of domestically developed DUV (Deep Ultraviolet) lithography manufacturing equipment, marking a significant advancement in China's semiconductor industry's efforts towards domestic substitution.

It is reported that the enterprise plans to produce about 5 DUV lithography machines by 2026 and scale up to about 20 machines by 2027. Although there is still a gap in capacity compared to the Dutch lithography giant ASML (which delivered 131 sets of immersion DUV lithography systems last year), the domestic production of DUV equipment indicates a further step towards self-sufficiency and controllability in China's chip manufacturing supply chain.